Special Gas Rack – Special Gas Cabinet – Wofly

Introduction

The special gas conveying cabinet is designed for the supply of flammable, explosive, corrosive, toxic and other dangerous gases.

The system can be divided into categories: fully automatic, semi-automatic and manual operation. Basic functions include automatic purge, automatic switching and automatic safety cut-off in emergency situations (when the set alarm signal is triggered).

The automatic gas tank is controlled by PLC, the touch screen is a man-machine interface, and the pressure sensor installed by the device.

Devices such as air-conditioning device, pneumatic valve, flow meter, etc., realize the safe and effective operation of the equipment. Its internal PLC programming safety interlock function of the meter and the reasonable selection and layout of high-purity valve parts meet the requirements of the semiconductor process production process.

The requirements for the continuous supply and high purity of special gases in the medium, but also to ensure the normal production of the factory and the personal life of the employees Safety.